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Semiconductor high cleanliness seal

Resistance Plasme FFKM,Ultrapure FFKM ,

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Hao Seal provides a variety of corrosion-resistant, high-cleanliness, high-purity seals and seals

Implementation standards: GB/T 3452, AS568, BS1516, JIS B2401, OEM, non-standard parts refer to ISO3302.1 M2 grade tolerance

Working pressure: 0-40Mpa

Working temperature: -60℃~327℃


For the cleanliness requirements of electronic panels and semiconductor industries, the materials we developed can meet the requirements of Low trace metal levels, Low particle release rates, and Low outgassing FFKM and FKM materials

1) For ultra-purity requirements, our material solution does not add any fillers, and the product is pure and transparent

2) For plasma resistance and high cleanliness requirements, our materials only add organic PTFE components, and the product is basically natural color, golden translucent, brown translucent and other colors

3) For general cleanliness requirements and requirements to reduce costs, our materials have a variety of response solutions, and the products are basically black, brown, and white

4) Our Ultrapure FFKM material can meet SEMI Ultra-clean specification requirements of F57-03001

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